Power-Efficient High-Speed and High-Resolution Capacitive-Sensor Interface for Subnanometer Displacement Measurements

Sha Xia, Stoyan Nihtianov. Power-Efficient High-Speed and High-Resolution Capacitive-Sensor Interface for Subnanometer Displacement Measurements. IEEE T. Instrumentation and Measurement, 61(5):1315-1322, 2012. [doi]

Abstract

Abstract is missing.