Power-Efficient High-Speed and High-Resolution Capacitive-Sensor Interface for Subnanometer Displacement Measurements

Sha Xia, Stoyan Nihtianov. Power-Efficient High-Speed and High-Resolution Capacitive-Sensor Interface for Subnanometer Displacement Measurements. IEEE T. Instrumentation and Measurement, 61(5):1315-1322, 2012. [doi]

@article{XiaN12-0,
  title = {Power-Efficient High-Speed and High-Resolution Capacitive-Sensor Interface for Subnanometer Displacement Measurements},
  author = {Sha Xia and Stoyan Nihtianov},
  year = {2012},
  doi = {10.1109/TIM.2011.2178678},
  url = {http://dx.doi.org/10.1109/TIM.2011.2178678},
  researchr = {https://researchr.org/publication/XiaN12-0},
  cites = {0},
  citedby = {0},
  journal = {IEEE T. Instrumentation and Measurement},
  volume = {61},
  number = {5},
  pages = {1315-1322},
}