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Self-Aligned Double-Patterning Aware Legalization

Hua Xiang, Gi-Joon Nam, Gustavo E. Téllez, Shyam Ramji, Xiaoqing Xu. Self-Aligned Double-Patterning Aware Legalization. In 2020 Design, Automation & Test in Europe Conference & Exhibition, DATE 2020, Grenoble, France, March 9-13, 2020. pages 1145-1150, IEEE, 2020. [doi]

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