Optimal Design, Fabrication, and Control of an $XY$ Micropositioning Stage Driven by Electromagnetic Actuators

Shunli Xiao, Yangmin Li. Optimal Design, Fabrication, and Control of an $XY$ Micropositioning Stage Driven by Electromagnetic Actuators. IEEE Transactions on Industrial Electronics, 60(10):4613-4626, 2013. [doi]

Abstract

Abstract is missing.