Yifeng Xiao, Miaodi Su, Haoyu Yang, Jianli Chen, Jun Yu, Bei Yu 0001. Low-Cost Lithography Hotspot Detection with Active Entropy Sampling and Model Calibration. In 58th ACM/IEEE Design Automation Conference, DAC 2021, San Francisco, CA, USA, December 5-9, 2021. pages 907-912, IEEE, 2021. [doi]
Abstract is missing.