Fabrication of micro-moiré gratings on a strain sensor structure for deformation analysis with micro-moiré technique

Huimin Xie, Satoshi Kishimoto, Yanjie Li, Qingjun Liu, Yapu Zhao. Fabrication of micro-moiré gratings on a strain sensor structure for deformation analysis with micro-moiré technique. Microelectronics Reliability, 49(7):727-733, 2009. [doi]

Abstract

Abstract is missing.