A Lateral Differential Resonant Pressure Microsensor Based on SOI-Glass Wafer-Level Vacuum Packaging

Bo Xie, Yonghao Xing, Yanshuang Wang, Jian Chen, Deyong Chen, Junbo Wang. A Lateral Differential Resonant Pressure Microsensor Based on SOI-Glass Wafer-Level Vacuum Packaging. Sensors, 15(9):24257-24268, 2015. [doi]

Abstract

Abstract is missing.