Global sliding mode-based tracking control of a piezo-driven XY micropositioning stage with unmodeled hysteresis

Qingsong Xu, Yangmin Li. Global sliding mode-based tracking control of a piezo-driven XY micropositioning stage with unmodeled hysteresis. In 2009 IEEE/RSJ International Conference on Intelligent Robots and Systems, October 11-15, 2009, St. Louis, MO, USA. pages 755-760, IEEE, 2009. [doi]

Abstract

Abstract is missing.