Optimal design and fabrication of a piezoactuated flexure XYZ parallel micropositioning stage

Qingsong Xu, Yangmin Li. Optimal design and fabrication of a piezoactuated flexure XYZ parallel micropositioning stage. In 2010 IEEE/RSJ International Conference on Intelligent Robots and Systems, October 18-22, 2010, Taipei, Taiwan. pages 3682-3687, IEEE, 2010. [doi]

Abstract

Abstract is missing.