Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements

Min Xu, Ziqi Zhou, Thomas Ahbe, Erwin Peiner, Uwe Brand. Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements. Sensors, 22(3):1298, 2022. [doi]

Abstract

Abstract is missing.