A 300-mm-wafer silicon photonics technology for advanced information systems

Koji Yamada, Guangwei Cong, Makoto Okano, Yuriko Maegami, Morifumi Ohno, Keijiro Suzuki, Satoshi Suda, Ryotaro Konoike, Kazuhiro Ikeda, Hitoshi Kawashima, Tsuyoshi Horikawa, Shu Namiki, Masahiko Mori, Shota Kita, Kengo Nozaki, Akihiko Shinya, Masaya Notomi. A 300-mm-wafer silicon photonics technology for advanced information systems. In 2nd International Symposium on Devices, Circuits and Systems, ISDCS 2019, Higashi-Hiroshima, Japan, March 6-8, 2019. pages 1-4, IEEE, 2019. [doi]

Abstract

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