Vacuum-assisted-spin-coating of polyimide liner for high-aspect-ratio TSVs applications

Yangyang Yan, Yingtao Ding, Qianwen Chen, Kang-Wook Lee, Takafumi Fukushima, Mitsumasa Koyanagi. Vacuum-assisted-spin-coating of polyimide liner for high-aspect-ratio TSVs applications. In 2015 International 3D Systems Integration Conference, 3DIC 2015, Sendai, Japan, August 31 - September 2, 2015. IEEE, 2015. [doi]

Abstract

Abstract is missing.