Experimental investigation of the dielectric-semiconductor interface with scanning capacitance microscopy

J. Yang, J. J. Kopanski, A. Postula, M. Bialkowski. Experimental investigation of the dielectric-semiconductor interface with scanning capacitance microscopy. Microelectronics Reliability, 45(5-6):887-890, 2005. [doi]

Authors

J. Yang

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J. J. Kopanski

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A. Postula

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M. Bialkowski

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