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Mechatronic Development and Vision Feedback Control of a Nanorobotics Manipulation System inside SEM for Nanodevice Assembly

Zhan Yang, Yaqiong Wang, Bin Yang, Guanghui Li, Tao Chen, Masahiro Nakajima, Lining Sun, Toshio Fukuda. Mechatronic Development and Vision Feedback Control of a Nanorobotics Manipulation System inside SEM for Nanodevice Assembly. Sensors, 16(9):1479, 2016. [doi]

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