Statistical Modeling and Simulation of Threshold Variation Under Random Dopant Fluctuations and Line-Edge Roughness

Y. Ye, F. Liu, M. Chen, S. Nassif, Y. Cao. Statistical Modeling and Simulation of Threshold Variation Under Random Dopant Fluctuations and Line-Edge Roughness. IEEE Trans. VLSI Syst., 19(6):987-996, 2011. [doi]

Abstract

Abstract is missing.