A TIA-based readout circuit with temperature compensation for MEMS capacitive gyroscope

Tao Yin, Huanming Wu, Qisong Wu, Haigang Yang, J. Jiao. A TIA-based readout circuit with temperature compensation for MEMS capacitive gyroscope. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 401-405, IEEE, 2011. [doi]

Abstract

Abstract is missing.