Effect of RF sputtering parameters on PZT crystal growth

Miao Yu, T. Giffney, Kean C. Aw, Haixia Zhang. Effect of RF sputtering parameters on PZT crystal growth. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 821-824, IEEE, 2013. [doi]

Abstract

Abstract is missing.