WISDOM: Wire spreading enhanced decomposition of masks in Double Patterning Lithography

Kun Yuan, David Z. Pan. WISDOM: Wire spreading enhanced decomposition of masks in Double Patterning Lithography. In 2010 International Conference on Computer-Aided Design (ICCAD 10), November 7-11, 2010, San Jose, CA, USA. pages 32-38, IEEE, 2010. [doi]

Abstract

Abstract is missing.