Fabrication and Performance Optimization of the Microplasma Reactor with Composite Dielectrics

Zhen Yuan, Li Wen, Leili Cheng, Jianqiang Ma, Jiaru Chu. Fabrication and Performance Optimization of the Microplasma Reactor with Composite Dielectrics. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 685-688, IEEE, 2012. [doi]

Abstract

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