Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook

Claude Yugma, Jakey Blue, Stéphane Dauzère-Pérès, Philippe Vialletelle. Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook. In 2014 IEEE International Conference on Automation Science and Engineering, CASE 2014, New Taipei, Taiwan, August 18-22, 2014. pages 93-98, IEEE, 2014. [doi]

Abstract

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