External Links

Cite Key

Statistics

  • References: 0
  • Cited by: 0
  • Reviews: 0
  • Bibliographies: 0

PDF

Researchr

Researchr is a web site for finding, collecting, sharing, and reviewing scientific publications, for researchers by researchers.

Sign up for an account to create a profile with publication list, tag and review your related work, and share bibliographies with your co-authors.

Assessment of dielectric charging in electrostatically driven MEMS devices: A comparison of available characterization techniques

U. Zaghloul, M. Koutsoureli, H. Wang, Fabio Coccetti, G. Papaioannou, Patrick Pons, Robert Plana. Assessment of dielectric charging in electrostatically driven MEMS devices: A comparison of available characterization techniques. Microelectronics Reliability, 50(9-11):1615-1620, 2010. [doi]

Abstract

Abstract is missing.

runs on