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Erratum to "On the reliability of electrostatic NEMS/MEMS devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel characterization methodologies" [MR 51/9-11 (2011) 1810-1818]

Usama Zaghloul, George Papaioannou, Bharat Bhushan, Fabio Coccetti, Patrick Pons, Robert Plana. Erratum to "On the reliability of electrostatic NEMS/MEMS devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel characterization methodologies" [MR 51/9-11 (2011) 1810-1818]. Microelectronics Reliability, 51(12):2416, 2011. [doi]

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