Effect of germane in gas phase on electronic properties of GeXSiY: H alloys deposited by RF plasma discharge

S. Zarate, Ismael Cosme, Andrey Kosarev, Svetlana Mansurova, A. Itzmoyotl, Hiram E. Martinez. Effect of germane in gas phase on electronic properties of GeXSiY: H alloys deposited by RF plasma discharge. In 13th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2016, Mexico City, Mexico, September 26-30, 2016. pages 1-4, IEEE, 2016. [doi]

Abstract

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