Yi Zhang, Daqun Bao, Hang Guo. Growth and characterization of PZT thin films with A Pt/Ti layer on silicon substrate. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 915-918, IEEE, 2009. [doi]
Abstract is missing.