Calibration of Wafer Handling Robots: A Fixturing Approach

Mike Tao Zhang, Ken Goldberg. Calibration of Wafer Handling Robots: A Fixturing Approach. In IEEE Conference on Automation Science and Engineering, CASE 2007, September 22-25, 2007. Scottsdale, Arizona, USA. pages 255-260, IEEE, 2007. [doi]

Abstract

Abstract is missing.