Huai Zhang, Zhibin Jiang, Hongtao Hu 0001. Multi-criteria Dynamic Scheduling Methodology for Controlling a Semiconductor Wafer Fabrication System. In IEEE Conference on Automation Science and Engineering, CASE 2007, September 22-25, 2007. Scottsdale, Arizona, USA. pages 213-218, IEEE, 2007. [doi]
Abstract is missing.