The Test Structures to Measure Resistivity and Contact Resistance of Poly-Si for Thermoelectric-Photoelectric Integrated Generator

Sen Zhang, Xiaoping Liao. The Test Structures to Measure Resistivity and Contact Resistance of Poly-Si for Thermoelectric-Photoelectric Integrated Generator. In 14th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019, Bangkok, Thailand, April 11-14, 2019. pages 443-446, IEEE, 2019. [doi]

Abstract

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