Finite element analysis and optimization of temperature field in GaN-MOCVD reactor

JinCheng Zhang, Zhiming Li, Yue Hao, Hao Wang, Peixian Li. Finite element analysis and optimization of temperature field in GaN-MOCVD reactor. Science in China Series F: Information Sciences, 53(10):2138-2143, 2010. [doi]

Abstract

Abstract is missing.