A Tunable Quasi-Zero Stiffness Mechanism for Thermal Compensation of a MEMS Gravimeter

Xiaopeng Zhang, Xueyong Wei, Yang Gao, Minghui Zhao, Yonghong Qi, Libo Zhao, Zhuangde Jiang. A Tunable Quasi-Zero Stiffness Mechanism for Thermal Compensation of a MEMS Gravimeter. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 1157-1160, IEEE, 2021. [doi]

Abstract

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