Silicon Nanowires embedded pressure sensor with annularly grooved diaphragm for sensitivity improvement

Songsong Zhang, Tao Wang, Chengkuo Lee, Liang Lou, Wei Mong Tsang, Dim-Lee Kwong. Silicon Nanowires embedded pressure sensor with annularly grooved diaphragm for sensitivity improvement. In 2014 IEEE Ninth International Conference on Intelligent Sensors, Sensor Networks and Information Processing (ISSNIP), Singapore, April 21-24, 2014. pages 1-6, IEEE, 2014. [doi]

Abstract

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