Hong Zhang, Huiming Xu, Yan Li, Zijun Song, Haisheng San, Yuxi Yu. A Si-Glass based pressure sensor with a single piezoresistive element for harsh environment applications. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 348-351, IEEE, 2013. [doi]
Abstract is missing.