Qihuan Zhang, Zhuoqing Yang, Qiu Xu, Mengyuan Zhao, Jinyuan Yao, Guifu Ding, Xiaolin Zhao. A MEMS inertial switch with compact constraint structures for lowering off-axis sensitivity. In 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016. pages 1-3, IEEE, 2016. [doi]
Abstract is missing.