Experimental Study on the Life and Nonlinear Actuation Behaviors of V-shaped SU-8 Electrothermal Microactuators

Zhuo Zhang, Yueqing Yu, Xuping Zhang. Experimental Study on the Life and Nonlinear Actuation Behaviors of V-shaped SU-8 Electrothermal Microactuators. In 14th IEEE International Conference on Control and Automation, ICCA 2018, Anchorage, AK, USA, June 12-15, 2018. pages 1052-1057, IEEE, 2018. [doi]

Abstract

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