Line Search-Based Inverse Lithography Technique for Mask Design

Xin Zhao, Chris Chu. Line Search-Based Inverse Lithography Technique for Mask Design. VLSI Design, 2012, 2012. [doi]

@article{ZhaoC12-4,
  title = {Line Search-Based Inverse Lithography Technique for Mask Design},
  author = {Xin Zhao and Chris Chu},
  year = {2012},
  doi = {10.1155/2012/589128},
  url = {http://dx.doi.org/10.1155/2012/589128},
  researchr = {https://researchr.org/publication/ZhaoC12-4},
  cites = {0},
  citedby = {0},
  journal = {VLSI Design},
  volume = {2012},
}