Xin Zhao, Chris Chu. Line Search-Based Inverse Lithography Technique for Mask Design. VLSI Design, 2012, 2012. [doi]
@article{ZhaoC12-4,
title = {Line Search-Based Inverse Lithography Technique for Mask Design},
author = {Xin Zhao and Chris Chu},
year = {2012},
doi = {10.1155/2012/589128},
url = {http://dx.doi.org/10.1155/2012/589128},
researchr = {https://researchr.org/publication/ZhaoC12-4},
cites = {0},
citedby = {0},
journal = {VLSI Design},
volume = {2012},
}