Micro-Raman spectroscopy analysis of residual stress in polysilicon MEMS resonators

Chenxu Zhao, Mengwei Li, Ming Yin, Zewen Liu. Micro-Raman spectroscopy analysis of residual stress in polysilicon MEMS resonators. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 570-573, IEEE, 2013. [doi]

Abstract

Abstract is missing.