Yang Zheng, Xuming Sun, Zhongliang Li, Xiuhan Li, Haixia Zhang. Flexible MEMS inductors based on Parylene-FeNi Compound Substrate for wireless power transmission system. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 1002-1005, IEEE, 2013. [doi]
Abstract is missing.