Large-Area Metalens Directly Patterned on a 12-Inch Glass Wafer using Immersion Lithography for Mass Production

Qize Zhong, Yuan Dong, Dongdong Li, Nanxi Li, Ting Hu, Zhengji Xu, Yanyan Zhou, Keng Heng Lai, Yuan Hsing Fu, Vladimir Bliznetsov, Hou-Jang Lee, Wei Loong Loh, Shiyang Zhu, Qunying Lin, Navab Singh. Large-Area Metalens Directly Patterned on a 12-Inch Glass Wafer using Immersion Lithography for Mass Production. In Optical Fiber Communications Conference and Exhibition, OFC 2020, San Diego, CA, USA, March 8-12, 2020. pages 1-3, IEEE, 2020. [doi]

Abstract

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