Performance of a Monolithic E-Nose Array Integrating MEMS and ALD Processing

Yilu Zhou, James Dieffenderfer, Erdem Sennik, Mahaboobbatcha Aleem, Jakob Speight, Shrey Vasisht, Ă–mer Oralkan, Bongmook Lee, Veena Misra. Performance of a Monolithic E-Nose Array Integrating MEMS and ALD Processing. In 2023 IEEE SENSORS, Vienna, Austria, October 29 - Nov. 1, 2023. pages 1-4, IEEE, 2023. [doi]

Abstract

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