Hao Zhou, Hailin Tang, Wei Su, Xianxue Liu. Robust design of a MEMS gyroscope considering the worst-case tolerance. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 1012-1016, IEEE, 2010. [doi]
Abstract is missing.