On-axis self-calibration of precision XYθz metrology systems: An approach framework

Yu Zhu, Chuxiong Hu, Jinchun Hu, Ming Zhang, Dengfeng Xu. On-axis self-calibration of precision XYθz metrology systems: An approach framework. In 2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Wollongong, Australia, July 9-12, 2013. pages 1078-1083, IEEE, 2013. [doi]

Abstract

Abstract is missing.