Zhen Zhu, Emma Salmi, Sauli Virtanen. Residual stress study of thin films deposited by atomic layer deposition. In Yajie Qin, Zhiliang Hong, Ting-Ao Tang, editors, 12th IEEE International Conference on ASIC, ASICON 2017, Guiyang, China, October 25-28, 2017. pages 233-236, IEEE, 2017. [doi]
Abstract is missing.