Integrated design of a secondary stage for magnetically levitated dual-stage positioning system

Haiyue Zhu, Tat Joo Teo, Chee Khiang Pang, Wenyu Liang. Integrated design of a secondary stage for magnetically levitated dual-stage positioning system. In IEEE International Conference on Advanced Intelligent Mechatronics, AIM 2017, Munich, Germany, July 3-7, 2017. pages 1340-1345, IEEE, 2017. [doi]

Abstract

Abstract is missing.