Scheduling of single-arm multi-cluster tools to achieve the minimum cycle time

Qinghua Zhu, Naiqi Wu, Yan Qiao, MengChu Zhou. Scheduling of single-arm multi-cluster tools to achieve the minimum cycle time. In 2013 IEEE International Conference on Robotics and Automation, Karlsruhe, Germany, May 6-10, 2013. pages 3555-3560, IEEE, 2013. [doi]

Abstract

Abstract is missing.