Qinghua Zhu, Naiqi Wu, Yan Qiao, MengChu Zhou. Petri net modeling and one-wafer scheduling of single-arm multi-cluster tools. In 2013 IEEE International Conference on Automation Science and Engineering, CASE 2013, Madison, WI, USA, August 17-20, 2013. pages 862-867, IEEE, 2013. [doi]
Abstract is missing.