Qinghua Zhu, MengChu Zhou, Yan Qiao, Naiqi Wu. Scheduling Close-Down Processes Subject to Wafer Residency Constraints for Single-Arm Cluster Tools. In 2015 IEEE International Conference on Systems, Man, and Cybernetics, Kowloon Tong, Hong Kong, October 9-12, 2015. pages 521-526, IEEE, 2015. [doi]
@inproceedings{ZhuZQW15,
title = {Scheduling Close-Down Processes Subject to Wafer Residency Constraints for Single-Arm Cluster Tools},
author = {Qinghua Zhu and MengChu Zhou and Yan Qiao and Naiqi Wu},
year = {2015},
doi = {10.1109/SMC.2015.102},
url = {http://dx.doi.org/10.1109/SMC.2015.102},
researchr = {https://researchr.org/publication/ZhuZQW15},
cites = {0},
citedby = {0},
pages = {521-526},
booktitle = {2015 IEEE International Conference on Systems, Man, and Cybernetics, Kowloon Tong, Hong Kong, October 9-12, 2015},
publisher = {IEEE},
isbn = {978-1-4799-8697-2},
}