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Petri Net Modeling and Scheduling of a Close-Down Process for Time-Constrained Single-Arm Cluster Tools

Qinghua Zhu, MengChu Zhou, Yan Qiao, Naiqi Wu. Petri Net Modeling and Scheduling of a Close-Down Process for Time-Constrained Single-Arm Cluster Tools. IEEE Transactions on Systems, Man, and Cybernetics, Part A, 48(3):389-400, 2018. [doi]

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