Horst Zisgen, Ingo Meents, Benjamin R. Wheeler, Thomas Hanschke. A queueing network based system to model capacity and cycle time for semiconductor fabrication. In Scott J. Mason, Raymond R. Hill, Lars Mönch, Oliver Rose, Thomas Jefferson, John W. Fowler, editors, Proceedings of the 2008 Winter Simulation Conference, Global Gateway to Discovery, WSC 2008, InterContinental Hotel, Miami, Florida, USA, December 7-10, 2008. pages 2067-2074, WSC, 2008. [doi]
Abstract is missing.