Resonant-based test method for MEMS devices

A. Dianat, A. Attaran, Rashid Rashidzadeh, Roberto Muscedere. Resonant-based test method for MEMS devices. In 21st IEEE International Conference on Electronics, Circuits and Systems, ICECS 2014, Marseille, France, December 7-10, 2014. pages 423-426, IEEE, 2014. [doi]

Abstract

Abstract is missing.