Hua Gan, Yufeng Jin, Min Miao, Xin Sun. A novel LTCC capacitive accelerometer embedded in LTCC packaging substrate. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 796-799, IEEE, 2011. [doi]
Abstract is missing.