Fabrication and characteristics of ZnO thin films deposited by RF sputtering on plastic substrates for flexible display

Dedong Han, Yi Wang, Shengdong Zhang, Lei Sun, Ruqi Han, Satoru Matsumoto, Yuji Ino. Fabrication and characteristics of ZnO thin films deposited by RF sputtering on plastic substrates for flexible display. Science in China Series F: Information Sciences, 55(6):1441-1445, 2012. [doi]

Abstract

Abstract is missing.